Grants and Contributions:
Title:
Decreasing the Carbon-Footprint of Atomic Layer Deposited Silicon Nitride
Agreement Number:
930512
Agreement Value:
$20,000.00
Agreement Date:
Jun 24, 2019 - Dec 30, 2019
Description:
Silicon nitride (SiN) is an important material in the semiconductor industry particularly for logic and memory applications. Atomic layer deposition (ALD) is suited for the growth of SiN films because of its extremely precise film thickness control and high conformality. Currently, most ALD processes are affected by non-idealities including steric hindrance and parasitic non-ALD growth processes. Consequently, this project aims to quantify how these non-idealities and the various growth parameters affect the ALD SiN growth by developing a quantitative ALD model. This predictive ALD model can characterize the efficiency of the SiN deposition and thus provide a roadmap towards reducing the carbon footprint of the ALD SiN process.
Organization:
National Research Council Canada
Expected Results:
The purpose of IRAP’s Youth Employment Program is to assist in increasing the supply of highly qualified people, promoting the benefits of advanced studies, demonstrating federal leadership by investing in the skills required to meet the needs of the knowledge economy and facilitating the transition of highly skilled young people to a rapidly changing labour market.
Location:
Edmonton, Alberta, CA T6G 1R1
Reference Number:
172-2019-2020-Q2-930512
Agreement Type:
Contribution
Report Type:
Grants and Contributions
Recipient Business Number:
773582689
Recipient Type:
For-profit organization
Amendment Date
Jun 24, 2019
Recipient's Legal Name:
Synthergy Inc
Federal Riding Name:
Edmonton Strathcona
Federal Riding Number:
48019
Program:
Industrial Research Assistance Program – Youth Employment Program
Program Purpose:
The purpose of IRAP’s Youth Employment Program is to assist in increasing the supply of highly qualified people, promoting the benefits of advanced studies, demonstrating federal leadership by investing in the skills required to meet the needs of the knowledge economy and facilitating the transition of highly skilled young people to a rapidly changing labour market.
Coverage:
IRAP Youth Employment Program projects stimulate wealth creation for Canada through technological innovation.
NAICS Code:
541710
Amendments: