Grants and Contributions:

Grant or Award spanning more than one fiscal year (2017-2018 to 2018-2019).

MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes arex000D
widely used in many consumer, industrial, automotive and biomedical applications. A resonator is anx000D
oscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be inx000D
oscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator'sx000D
oscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving higherx000D
sensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, andx000D
Thermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reducex000D
damping, and specifically, TED. One performance parameter that quantifies resonators damping is calledx000D
Quality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy duringx000D
oscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q byx000D
minimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Qx000D
(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k.x000D
Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performancex000D
resonant gyroscopes. In order to design such devices different loss mechanisms on their design have to bex000D
analyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens andx000D
Dr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematicallyx000D
provide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens withx000D
valuable knowledge and feedback showing a path to modify their design to reach high end applications. Itx000D
would also provide greater scientific insights to the academic and industry community by showing relationshipsx000D
between design and material parameters that effect performance in resonant gyroscopes. It would facilitatex000D
further development of MEMS based high precision resonant gyroscopes.