Grants and Contributions:

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Title:

Advanced instrumentation for multi-modal nanometric measurement inside SEM

Agreement Number:

CRDPJ

Agreement Value:

$321,387.00

Agreement Date:

Nov 8, 2017 -

Organization:

Natural Sciences and Engineering Research Council of Canada

Location:

Ontario, CA

Reference Number:

GC-2017-Q3-00365

Agreement Type:

Grant

Report Type:

Grants and Contributions

Additional Information:

Grant or Award spanning more than one fiscal year (2017-2018 to 2020-2021).

Recipient's Legal Name:

Sun, Yu (University of Toronto)

Program:

Collaborative Research and Development Grants - Project

Program Purpose:

The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterialsx000D
and nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sizedx000D
transistors for failure analysis, and lithium ion battery development requires characterization ofx000D
nanomaterials-based electrode property changes during electrochemical cycles. Our research group previouslyx000D
developed a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)x000D
to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon thex000D
previous work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to developx000D
a new instrument and a number of nano characterization techniques, which will, for the first time, enablex000D
comprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials underx000D
SEM imaging.x000D
The goal of the project is to develop a new instrument capable of multi-modal imaging and nanox000D
characterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:x000D
(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To developx000D
techniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with thex000D
capability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)x000D
probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM modulex000D
for the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) Tox000D
enable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber ofx000D
SEM. This powerful nano instrument will find important applications in such industries as nano electronics,x000D
precision instrumentation, batteries etc