Grants and Contributions:

Grant or Award spanning more than one fiscal year (2017-2018 to 2018-2019).

This six month project aims to achieve standard NbN and NbTiN thin films of 100-200 nm thickness onx000D
sapphire substrates using nitrogen ion implantation, and compare their physical properties to similar filmsx000D
prepared by sputter deposition for quality control and process optimization. These features address a problemx000D
of critical importance for Angstrom Engineering Inc., our industrial partner, who develops advanced depositionx000D
systems and implements fabrication processes for basic and applied research, related to sensing technology,x000D
superconductive electronic devices and nanomaterials engineering. The company will provide pure depositedx000D
Nb and NbTi films that will be implanted by N+ ion and annealed at INRS, as well as NbN and NbTiNx000D
samples synthesized under different deposition parameters using Angstrom's commercial instruments. Thex000D
energy and dose of implanted nitrogen ions will be set to enable a relevant comparison between the differentx000D
samples, using Monte-Carlo simulations supported by advanced characterization tools, such as SE, SEM, EDX,x000D
Raman, and XRD analyses. Both NbN and NbTiN films prepared by sputter deposition and processed by ionx000D
implantation will be then investigated at low-temperatures, to measurement their electrical resistivity andx000D
critical temperatures. Our research will be mainly conducted in the Montréal Area, where facilities for ionx000D
implantation and advanced characterization are available. To achieve our objectives, which include thex000D
processing of several ion-implanted prototypes to be used as reference specimens by the company and extendx000D
both the know-how and the expertise of Angstrom's scientific staff, Prof. Rosei will be assisted by a researchx000D
associate during the whole duration of the project. The expected impact will result in advancing knowledge onx000D
Nb-based superconductive films and their synthesis, for future work in the areas of non-destructive metrology,x000D
advanced manufacturing and materials engineering.